GPTECH air-cooled precision chiller in a semiconductor cleanroom
TLS SERIES · SEMICONDUCTOR THERMAL SYSTEMS

Precision ThermalIntelligence

Stable temperature control that protects process performance, yield and uptime.

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  • 5–85℃Temperature range
  • ±0.1℃Control accuracy
  • 0.01℃Display resolution
  • Precise Control±0.1℃ high-precision control
  • Intelligent PIDAdaptive control algorithm
  • Multi-Layer ProtectionKeeps equipment running safely
  • Industrial CommsRS485 Modbus RTU

Industries

Wafer and probe head on inspection equipment

Semiconductor Equipment

Stable thermal load control that protects process accuracy

Precision analytical instruments in a cleanroom

Analytical Instruments

Meets laboratory duty cycles with long-term stability

Laser cutting a metal workpiece

Precision Machining

Supports laser, CVD and test-platform thermal control

Pharmaceutical vial filling line in a sterile room

Pharma & Chemical

Keeps process temperature steady

Integrated Cooling & Heating System

PreciseResponsiveReliable

  • Cooling & heating in oneCovers a wide range of process needs
  • PLC intelligent controlReal-time monitoring and fine adjustment
  • High-efficiency circulationBrings temperature to set point fast
GPTECH integrated cooling and heating system: condenser, compressor, evaporator, expansion tank, circulation pump and user equipment123456
  1. 1Air-cooled condenser
  2. 2Compressor
  3. 3Evaporator / buffer tank
  4. 4Expansion tank
  5. 5Circulation pump
  6. 6User equipment
Cooling loopHeating loop

TLS Series Models

TLS-1.5
TLS-1.51.5kW

Range: 5–85℃

TLS-2.5
TLS-2.52.5kW

Range: 5–85℃

TLS-3.5
TLS-3.53.5kW

Range: 5–85℃

TLS-5.5
TLS-5.55.5kW

Range: 5–85℃

TLS-7.5
TLS-7.57.5kW

Range: 5–85℃

TLS-10
TLS-1010kW

Range: 5–85℃

TLS-15
TLS-1515kW

Range: 5–85℃

View full specifications

Outlet temperature holds to ±0.1℃, and the touchscreen’s curve logging lets us keep a traceable thermal record for every run.

Equipment Engineering LeadSemiconductor manufacturer

Find the right unit for your process

Seven series spanning -150℃ to +350℃ — from semiconductor processes to analytical instruments, precision machining and industrial process cooling. Send us your target temperature, heat load and flow, and an engineer will reply within one working day.

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