TLSFor Semiconductor Equipment
TLS Series Precision Chiller
Purpose-built for semiconductor equipment · high-precision thermal control
Cooling and temperature control for heat-generating sections of semiconductor manufacturing and analytical equipment.
- Temperature range5–85℃
- Control accuracy±0.1℃
- Display resolution0.01℃
- ControlPLC+PID
- CommunicationRS485 Modbus RTU
Overview
The TLS precision chiller operates from 5 to 85℃. With a built-in heater it works as a combined cooling and heating unit; models are named after heating power, which ranges from 1.5 to 25 kW. It meets demanding precision-control requirements and can be fitted with a flow meter and pressure transducer on request. Typical duty is cooling and temperature control of heat-generating sections in semiconductor manufacturing equipment and analytical instruments.
Features
- 01Integrated cooling and heating with ±0.1℃ accuracy
- 027-inch colour touchscreen with temperature-curve logging
- 03Optional flow meter and pressure transducer
- 04Fixed set-point, programmed profile and ramped control modes
Typical Applications
- Cooling of heat-generating sections in semiconductor equipment
- Temperature control for analytical instruments
- Wafer process control (diffusion, etch, CMP)
- Constant temperature for lasers and optical benches
Working Principle
Model Designation
DLS—B0.5WN
- 1. Product series code
- 2. Temperature code: A -10℃–RT, B -25℃–RT, C -40℃–RT; 5℃–RT is not marked
- 3. Capacity code: cooling capacity at 5℃ above the minimum outlet temperature, e.g. 0.5 kW at -20℃. For industrial and precision chillers it is the capacity at a 20℃ outlet; for screw chillers it is the compressor code
- 4. Condensing: W for water-cooled; air-cooled is not marked
- 5. Non-standard code: see the non-standard code rules; omitted if not required
Specifications
Data taken from the GPTECH product catalogue. Contact us for other models or custom specifications.
SpecificationsTLS Series 5–85℃
| Model | TLS-1.5 | TLS-2.5 | TLS-3.5 | TLS-5.5 | TLS-7.5 | TLS-10 | TLS-15 | |
|---|---|---|---|---|---|---|---|---|
| Main application | Cooling and temperature control of heat-generating sections in semiconductor manufacturing equipment and analytical instruments. | |||||||
| Temperature range | 5–85℃ | |||||||
| Heating power kW | 1.5 | 2.5 | 3.5 | 5.5 | 7.5 | 10 | 15 | |
| Cooling capacity kW | 20℃ | 1.5 | 2.5 | 3.5 | 5.5 | 7.5 | 10 | 15 |
| 10℃ | 1.1 | 1.5 | 2.5 | 3.8 | 5.5 | 7.5 | 12.5 | |
| Max. pump flow L/min | 15 | 20 | 30 | 35 | 50 | 60 | 90 | |
| Max. pump head m | 12 | 15 | 20 | 20 | 25 | 25 | 25 | |
| Buffer tank volume L | 3.5 | 5.5 | 10 | 15 | 20 | 25 | 30 | |
| Control system | PLC controller with intelligent PID temperature module for precise control and real-time display | |||||||
| Controlled variable | Unit outlet temperature control | |||||||
| Control modes | Fixed set-point by default; programmable profile and ramped heating/cooling optional | |||||||
| Communication | RS485 interface as standard, Modbus RTU protocol | |||||||
| External inputs | External temperature sensor port (3-wire PT100 standard, 4–20 mA or bus set-point optional), USB data port | |||||||
| Temperature feedback | PT100 feedback on the heat-transfer medium (inlet and outlet temperature) | |||||||
| Control accuracy | ±0.1℃ | |||||||
| Display resolution | 0.01℃ | |||||||
| HMI | 7-inch colour touchscreen, Chinese/English UI, intuitive operation, displays and logs temperature curves and test data | |||||||
| Protection | Real-time status display and automatic fault diagnosis with multi-level alarms: earth leakage, power failure, circulation-pump overload, compressor overload, high/low refrigerant pressure, compressor suction/discharge over-temperature, heater dry-burn protection, abnormal pump outlet pressure, temperature module fault and sensor fault. | |||||||
| Refrigerant | R22/R407C | |||||||
| Port size | G1/2 | G1/2 | G3/4 | G3/4 | G1 | G1 | G1.2 | |
| Dimensions cm | 50×45×90 | 60×45×125 | 75×55×145 | 85×55×145 | 85×55×145 | 90×65×155 | 115×75×175 | |
| Weight kg | 95 | 125 | 165 | 205 | 225 | 350 | 450 | |
| Enclosure | Powder-coated cold-rolled steel (standard RAL 9016, SUS304 optional) | |||||||
| Power supply ph/v/Hz | 1/220/50 | 3/380/50 | ||||||
| Connected load kW | 2.3 | 4 | 6 | 8.5 | 11 | 15 | 22 | |
| Options | Optional control of medium outlet flow and pressure; purge and pressurisation functions available | |||||||
※ Notes
- Cooling capacities are based on 20℃ cooling-water inlet temperature; air-cooled units at 20℃ ambient.
- Flow and head figures apply to water at 20℃; pump performance varies with the density and temperature of the medium.
- Buffer tank volumes are indicative and can be adjusted to the required ramp rate and thermal storage.
- Only part of the product range is listed. For other models or customised requirements please contact our sales team. Specifications are subject to change without notice.
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